EVG^® NILPhotonics^® Competence Center

EVG’s NILPhotonics Competence Center is a flexible cooperation model that leverages EVG’s equipment and process knowhow gained through many years of experience to support the diversified needs of the photonics market. It is EVG’s goal to develop customer and industry partnerships, conjointly overcome challenges, and shorten the time to market for innovative photonic devices and applications. EVG has a particular focus on making the benefits of NIL accessible to the photonics community as it has proven to be an enabling solution for a number of novel photonic devices. EVG has a global partner network to draw from to support its customers’ process integration and optimization efforts across the NIL infrastructure, including template, resist materials and supporting metrology. Multidisciplinary teams provide an in-depth understanding of material interactions and surface chemistry as well as process and equipment requirements for scaling from first feasibility to volume production. As a result, EVG is able to provide consultation and support during process development and ramp-up to pilot manufacturing.

The EVG S&R Mastering Shop is an addition to the NILPhotonics Competence Center™ that provides contract manufacturing of large-area step-and-repeat nanoimprint masters and stamps. These S&R masters are ideally suited for use in wafer-level and panel-level nanoimprint lithography (NIL) manufacturing. The EVG S&R Mastering Shop accelerates the deployment of NIL in high-volume manufacturing by providing the ability to cost-effectively scale the process to larger substrate formats. Additionally, by utilizing this service offering, customers can reduce the development and investment risks associated with owning a dedicated S&R mastering line, and focus their efforts on the production line. In this way, customers can more easily integrate NIL technology in their new product designs and enable rapid and cost-effective scaling of NIL-enabled products from R&D to high-volume production.

As an alternative or complement to spin coating, we specialize in inkjet coating. Within our NIL Photonics Competence Center, we provide both process development and services to meet the specific requirements of our customers. The advantages of inkjet technology include high precision, flexibility, cost-effectiveness and reduced material consumption. Inkjet coating enables uniform or selective area printing, fill factor adjusted volume dispensing, and the capability to achieve different layer thicknesses with fine-tuning within only one process step.